ENHANCED HARDNESS IN LATTICE-MATCHED SINGLE-CRYSTAL TIN V0.6NB0.4N SUPERLATTICES

被引：144

作者：

MIRKARIMI, PB ^{[1
]}

HULTMAN, L ^{[1
]}

BARNETT, SA ^{[1
]}

机构：

[1] LINKOPING UNIV,DEPT PHYS,S-58183 LINKOPING,SWEDEN

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 25期

关键词：

D O I：

10.1063/1.104189

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single-crystal TiN/V0.6Nb0.4N superlattice films were deposited on MgO(100) substrates using ultrahigh vacuum reactive sputtering from two magnetron sources with a computer-controlled shutter. X-ray diffractometer measurements showed first- and second-order superlattice peaks while electron diffraction showed up to seventh-order superlattice reflections. Direct observations using cross-sectional transmission electron microscopy showed that the superlattices had flat, abrupt interfaces, but contained threading dislocations. Microhardness values for the superlattices ranged from to 3100 to 4100 kg/mm2, depending on the superlattice period (λ), compared with 1500 for an alloy with equal average composition. The hardness values for these lattice-matched superlattices agreed with those previously reported for TiN/VN superlattices with a lattice mismatch of 2.4%, although the hardness peak was less pronounced. The present results indicate that coherency strains do not play the major role in enhancing the hardness of these nitride superlattices.

引用

页码：2654 / 2656

页数：3

共 15 条

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