RARE-EARTH DOPED SILICA WAVE-GUIDES ON SI FABRICATED BY FLAME HYDROLYSIS DEPOSITION AND AEROSOL DOPING

被引：15

作者：

BEBBINGTON, JA

BARBAROSSA, G

BONAR, JR

AITCHISON, JS

机构：

[1] University of Glasgow, Department of Electronics and Electrical Engineering, Glasgow

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 04期

关键词：

D O I：

10.1063/1.109645

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High silica waveguides on Si fabricated by flame hydrolysis deposition were doped with rare earth ions using an aerosol doping technique. Rare earth doping levels in the glass were dependent on the nebulized solution strength and the delivery rate of the aerosol to the burner, giving the possibility of selective area doping.

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页码：337 / 339

页数：3

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