A NOVEL ROUTE TO THE 2ND-GENERATION ALKALINE-EARTH METAL PRECURSORS FOR METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION - ONE-STEP SYNTHESIS OF M(HFA)2-CENTER-DOT-TETRAGLYME (M=BA, SR, CA AND HFA = 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE)

被引：77

作者：

MALANDRINO, G ^{[1
]}

CASTELLI, F ^{[1
]}

FRAGALA, IL ^{[1
]}

机构：

[1] UNIV CATANIA,DIPARTIMENTO SCI CHIM,V A DORIA 6,I-95125 CATANIA,ITALY

来源：

INORGANICA CHIMICA ACTA | 1994年 / 224卷 / 1-2期

关键词：

MOCVD APPLICATION; ALKALINE EARTH METAL COMPLEXES; BETA-DIKETONATE COMPLEXES;

D O I：

10.1016/0020-1693(94)04123-7

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

A one-pot reaction for the synthesis of better performing alkaline-earth precursors for metal-organic chemical vapour deposition (MOCVD) applications, is reported. The reaction of metal hydroxides (Ba(OH)2.8H2O, Sr(OH)2.8H2O) or oxide (CaO) with Hhfa and tetraglyme in air yields quantitatively monomeric, water-free, highly stable and volatile M(hfa)2.tetraglyme adducts. All the adducts have been characterized by TGA and DSC. MOCVD capabilities have been tested through depositions of metal fluoride for buffer layer applications and of BaCaCu matrices for HT(c) TlBaCaCu superconductor thin films.

引用

页码：203 / 207

页数：5

共 23 条

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[10]

MALANDRINO G, UNPUB

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