THE PRODUCTION OF THIN-FILMS OF LIMN2O4 BY ELECTROSPRAYING

被引:109
作者
VANZOMEREN, AA
KELDER, EM
MARIJNISSEN, JCM
SCHOONMAN, J
机构
[1] DELFT UNIV TECHNOL,APPL INORGAN CHEM LAB,JULIANALAAN 136,2628 BL DELFT,NETHERLANDS
[2] DELFT UNIV TECHNOL,PARTICLE TECHNOL LAB,2628 BL DELFT,NETHERLANDS
关键词
D O I
10.1016/0021-8502(94)90211-9
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Electrospraying comprises the generation of an aerosol by applying a high voltage to the surface of a liquid, which contains certain precursor materials. The method was used commonly to form nanocrystalline oxidic ceramic powders. The method here is modified in order to deposit thin films, using the aerosols as the adsorbing species. This novel technique is shown to have a high deposition rate and a high efficiency relative to well-established thin film deposition techniques such as chemical and physical vapor deposition (CVD) and PVD). In addition, the method allows easy control of the stoichiometry and microstructure of the deposits. The synthesis of LiMn2O4 having the spinel structure and which is used as a cathode material in rechargeable lithium batteries is described.
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页码:1229 / &
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