FIDELITY OF POSTSCRIPT-GENERATED MASKS FOR DIFFRACTIVE OPTICS FABRICATION

A page description language such as POSTSCRIPT provides inexpensive and rapid output to high-resolution graphics engines for generating binary masks. However, the limitations of this technology have not been considered beyond a statement of the resolution of the output device. Measurements of three high-resolution laser image setters to quantify the limitations inherent to this type of mask fabrication show that the spot size and spot placement affect the performance of the final element. The expression of the graphics figure within the illustration program used to print the masks must also be considered. Strategies for compensating for print errors are described.