A PIEZOELECTRIC-DRIVE TABLE AND ITS APPLICATION TO MICRO-GRINDING OF CERAMIC MATERIALS

被引：26

作者：

MIZUTANI, K

KAWANO, T

TANAKA, Y

机构：

[1] Osaka Prefectural Industrial Technology Research Institute, Nishiku, Osaka, 550, 2-1-53, Enokojima

[2] College of Engineering, University of Osaka Prefecture, Sakai

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1990年 / 12卷 / 04期

关键词：

grinding ceramics; groove formation; micro-positioning; piezoelectric actuators; resolution; stiffness; surface finish;

D O I：

10.1016/0141-6359(90)90064-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A micro-positioning table with a 0.005 μm resolution has been developed to enhance the performance of a conventional grinding machine in the fine grinding of ceramics. A piezoelectric actuator with high stiffness and resolution has been applied to drive the table and to provide small depths of cut for the workpiece. The performance of the table is investigated with both open and closed-loop operation to drive the actuator. The accuracy and stiffness of the positioning are improved by means of the closed-loop control. Grinding experiments with ceramics, such as partially stabilized zirconia (PSZ) and hot-pressed silicon nitride (Si3N4), were carried out to demonstrate the performance of the table. The actual resolution of depth-of-cut control was determined by measuring ground groove depths on the ceramic surface. A mirror-like surface on the ceramic was easily obtained by grinding at the small depth of cut of 0.1 μm with the aid of the table. © 1990.

引用

页码：219 / 226

页数：8

共 18 条

[1]

Puttick, Shahid, Hosseini, Size Effects in Abrasion of Brittle Materials, J Phys D: Appl Phys., 12, pp. 195-202, (1979)

[2]

Marshall, Evans, Khuri Yakub, Tien, Kino, The Nature of Machining Damage in Brittle Materials, Proc Roy Soc London, 385 A, pp. 461-475, (1983)

[3]

Lavine, A Simple Model for Convective Cooling During the Grinding Process, J Engng for Industry, Trans ASME, 110, 1, pp. 1-6, (1988)

[4]

Yasui, Workpiece Burn in Wet Grinding, Proc 6th ICPE, pp. 406-411, (1987)

[5]

Cook, Lawn, Dabbs, Chantilkul, Effect of Machining Damage on the Strength of a Glass-Ceramic, Journal of the American Ceramic Society, 64 C, pp. C121-C122, (1981)

[6]

Mizutani, Tanaka, Mechanics of Material Removal in Orthogonal Cutting of Ceramics, J JSPE, 52, 10, pp. 102-107, (1986)

[7]

Mizutani, Tanaka, Lengths of Crack Extension and Upper Limits of Depth of Cut Preventing Crack Extension in Orthogonal Cutting of Ceramics, J JSPE, 53, 11, pp. 100-106, (1987)

[8]

Moriwaki, Iwata, Okuda, Basic Study on Machinability of Zirconia Ceramics in Precision Diamond Cutting, Proc Winter Annual Meeting of ASME, pp. 151-158, (1988)

[9]

Schinker, Doll, Turning of Optical Glasses at Room Temperature, Proc SPIE, 802, pp. 70-80, (1987)

[10]

Patterson, Magrab, Design and Testing of a Fast Tool Servo for Diamond Turning, Precision Engng., 7, 3, pp. 123-128, (1985)

← 1 2 →