ELECTRON-SENSITIVE RESISTS .2. POSITIVE RESISTS DERIVED FROM HIGH POLYMERS OF METHYL-METHACRYLATE, METHYL ALPHA-CHLOROACRYLATE, AND HEXYL METHACRYLATE

被引：12

作者：

LAI, JH

SHRAWAGI, S

机构：

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1978年 / 22卷 / 01期

关键词：

D O I：

10.1002/app.1978.070220105

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

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页码：53 / 58

页数：6

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