UHV APPLICATION OF SPRING-LOADED TEFLON SEALS

被引：40

作者：

AUERBACH, DJ

BECKER, CA

COWIN, JP

WHARTON, L

机构：

[1] UNIV CHICAGO,DEPT CHEM,CHICAGO,IL 60637

[2] UNIV CHICAGO,JAMES FRANCK INST,CHICAGO,IL 60637

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1978年 / 49卷 / 11期

关键词：

D O I：

10.1063/1.1135303

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1518 / 1519

页数：2

共 8 条

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[5] SEALING LARGE ULTRAHIGH-VACUUM FLANGES WITH POLYTETRAFLUOROETHYLENE GASKETS [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (03) :425-+

[6] MOLECULAR BEAM REACTIVE SCATTERING APPARATUS WITH ELECTRON BOMBARDMENT DETECTOR [J].

LEE, YT ;

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REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (11) :1402-+

[7]

MERRILL RP, 1971, J VAC SCI TECHNOL, V8, P518

[8]

Roth A., 1966, VACUUM SEALING TECHN

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