30 YEARS OF TURBOMOLECULAR PUMPS - A REVIEW AND RECENT DEVELOPMENTS

被引：13

作者：

HENNING, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575676

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1196 / 1201

页数：6

共 21 条

ABBEL, K ;

HENNING, J ;

LOTZ, H .

[2] PROBLEMS WITH TURBOMOLECULAR PUMPS IN MAGNETIC-FIELDS [J].

BECKER, W ;

HENNING, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :768-770

BECKER, W .

[4] NEW HIGH-PERFORMANCE DISKS FOR TURBO-MOLECULAR PUMPS [J].

BECKER, W ;

NESSELDREHER, W .

[5]

BECKER W, 1958, VAKUUM-TECH, V7, P149

[6]

BERNHARDT K, FUSD2178512 EUR AT E

BERNHARDT, KH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :136-139

[8]

CHU TG, 1983, J VAC SCI TECHNOL, V20, P1101

[9]

FRANK R, 1976, VAKUUM-TECH, V25, P141

[10]

Gaede W, 1913, ANN PHYS-BERLIN, V41, P337