THE DISILICIDES OF TUNGSTEN, MOLYBDENUM, TANTALUM, TITANIUM, COBALT, AND NICKEL, AND PLATINUM MONOSILICIDE - A SURVEY OF THEIR THERMODYNAMIC PROPERTIES

被引：34

作者：

CHANDRASEKHARAIAH, MS

MARGRAVE, JL

OHARE, PAG

机构：

[1] HARC, Materials Science Research Center, 4802 Research Forest Drive, The Woodlands

[2] Chemical Kinetics and Thermodynamics Division, National Institute of Standards and Technology, Gaithersburg

来源：

JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA | 1993年 / 22卷 / 06期

关键词：

CHEMICAL THERMODYNAMICS; COBALT DISILICIDE; ENTHALPY INCREMENTS; EVALUATED PROPERTIES; MOLYBDENUM DISILICIDE; NICKEL DISILICIDE; PLATINUM MONOSILICIDE; STANDARD ENTHALPIES OF FORMATION; STANDARD GIBBS FREE ENERGIES OF FORMATION; TANTALUM DISILICIDE; TITANIUM DISILICIDE; TUNGSTEN DISILICIDE;

D O I：

10.1063/1.555922

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A critical evaluation is presented of the thermodynamic properties of six disilicides and one monosilicide that are important in the manufacture of very large scale integrated circuits. Values of the standard molar enthalpies of formation Delta(f)H(m) degrees at T = 298.15 K and p degrees = 0.1 MPa are recommended as follows: WSi2 -(79 +/- 5) kJ.mol(-1); MoSi2, - (137 +/- 4) kJ.mol(-1); TiSi2, -(171 +/- 11) kj.mol(-1); CoSi2, -(103 +/- 15) kJ.mol(-1); NiSi2, -(88 +/- 12) kJ.mol(-1); TaSi2, -(120 +/- 20) kJ.mol(-1); and PtSi, -(119 +/- 7) kJ.mol(-1). Equations are given for the molar enthalpy increments of some of the silicides along with a few evaluated standard Gibbs free energies of formation. Brief descriptions of methods of synthesis and limited structural information have also been included.

引用

页码：1459 / 1468

页数：10