PULSED LASER ANNEALING OF ZINC IMPLANTED GAAS

被引:15
作者
KULAR, SS
SEALY, BJ
STEPHENS, KG
CHICK, DR
DAVIS, QV
EDWARDS, J
机构
关键词
D O I
10.1049/el:19780058
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:85 / 87
页数:3
相关论文
共 15 条
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    KULAR, SS
    SEALY, BJ
    STEPHENS, KG
    [J]. ELECTRONICS LETTERS, 1978, 14 (01) : 2 - 4
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