SB-DOPED SNO2 FILMS DEPOSITED BY THE CMD (CHEMICAL MIST DEPOSITION) METHOD

被引：11

作者：

IIDA, H ^{[1
]}

MISHUKU, T ^{[1
]}

ITO, A ^{[1
]}

KATO, K ^{[1
]}

YAMANAKA, M ^{[1
]}

HAYASHI, Y ^{[1
]}

机构：

[1] ELECTROTECH LAB, TSKUBA, IBARAKI 305, JAPAN

来源：

SOLAR ENERGY MATERIALS | 1988年 / 17卷 / 06期

关键词：

Antimony and Alloys - Solar Cells;

D O I：

10.1016/0165-1633(88)90001-9

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

A new deposition method called CMD (chemical mist deposition) is proposed for the preparation of SnO2 films. The method is primarily applicable to solar cells. The films are prepared in a mixed mist and gas atmosphere, and the method has some good features of the spray and CVD (chemical vapor deposition) methods. Features of the CMD method and characteristics of Sb-doped SnO2 films prepared by it are reported in this paper.

引用

页码：407 / 423

页数：17

共 8 条

[1] THE STRUCTURE OF NATIVELY TEXTURED SNO2 FILM AND ITS APPLICATION TO AN OPTICAL CONFINEMENT-TYPE A-SI-H SOLAR-CELL [J].