ANALYSIS OF MULTIPLE-ANGLE ELLIPSOMETRY OF UNIAXIAL ULTRATHIN ORGANIC FILMS AT THE AIR-WATER-INTERFACE AND DETERMINATION OF THE REFRACTIVE-INDEXES OF BEHENIC ACID MONOLAYERS

被引:63
作者
PAUDLER, M [1 ]
RUTHS, J [1 ]
RIEGLER, H [1 ]
机构
[1] UNIV MAINZ,INST PHYS CHEM,WELDER WEG 11,W-6500 MAINZ,GERMANY
关键词
D O I
10.1021/la00037a034
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Multiple-angle ellipsometry of uniaxial ultrathin films is discussed analytically and by computer analysis. The various relations between angle of incidence, layer thickness, and refractive indices are presented. It is shown that multiple-angle ellipsometry conveys sets of experimental data well suited for computer analysis with high redundancy by exposing systematic experimental errors. The ellipsometric data allow no unique characterization of ultrathin, uniaxial, nonabsorbing films and it is demonstrated that the derived layer thickness depends strongly on assumptions of the layer anisotropy. For typical experimental results the allowed range of combinations of the refractive index values as a function of an assumed layer thickness is presented. Calculations show that certain combinations of refractive indices will result in an ellipsometric angle delta-DELTA = 0 for all angles of incidence. Some of these combinations are physically realistic and might in fact be experimentally accessible. The potential of ellipsometric experiments to characterize ultrathin films is demonstrated by combining the method with data known from X-ray diffraction. Thus we have determined the refractive indices for a behenic acid monolayer in the S and CS phase, respectively, to n(x)S = 1.47, n(z)S = 1.54 and n(x)CS = 1.48, n(z)CS = 1.56. These values are deduced from the measured ellipsometric angles, a Lorentz-Lorenz approximation for the refractive indices, and structural data known from X-ray measurements.
引用
收藏
页码:184 / 189
页数:6
相关论文
共 23 条
[1]   MULTIPLE-WAVELENGTH ELLIPSOMETRY IN THIN UNIAXIAL NONABSORBING FILMS [J].
ANTIPPA, AF ;
LEBLANC, RM ;
DUCHARME, D .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1986, 3 (11) :1794-1802
[2]  
ATKINS PW, 1986, PHYSICAL CHEM
[3]   CHARACTERIZATION OF A VERY THIN UNIAXIAL FILM ON A NON-ABSORBING SUBSTRATE BY MULTIPLE WAVELENGTH ELLIPSOMETRY - PALMITIC ACID ON WATER [J].
AYOUB, GT ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1978, 68 (07) :978-983
[4]  
Azzam RMA., 1999, ELLIPSOMETRY POLARIZ
[5]   ELLIPSOMETRY OF ANISOTROPIC THIN-FILMS [J].
DESMET, DJ .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) :631-638
[6]   ELLIPSOMETRIC STUDY OF THE PHYSICAL STATES OF PHOSPHATIDYLCHOLINES AT THE AIR-WATER-INTERFACE [J].
DUCHARME, D ;
MAX, JJ ;
SALESSE, C ;
LEBLANC, RM .
JOURNAL OF PHYSICAL CHEMISTRY, 1990, 94 (05) :1925-1932
[7]   NULL ELLIPSOMETER FOR THE STUDIES OF THIN-FILMS AT GAS WATER INTERFACE [J].
DUCHARME, D ;
TESSIER, A ;
LEBLANC, RM .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (04) :571-578
[8]  
ENGELSEN DD, 1974, J CHEM SOC FARAD T 1, V70, P1603
[9]  
ENGELSEN DD, 1971, J OPT SOC AM, V61, P1460
[10]  
ENGELSEN DD, 1976, SURF SCI, V56, P272