SIMPLE, SAFE, AND ECONOMICAL MICROWAVE PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION FACILITY

被引:33
作者
BREWER, MA
BROWN, IG
DICKINSON, MR
GALVIN, JE
MACGILL, RA
SALVADORI, MC
机构
[1] Lawrence Berkeley Laboratory, University of California, Berkeley
关键词
D O I
10.1063/1.1142557
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A simple and economical microwave plasma-assisted chemical vapor deposition facility has been developed and used for synthesis of diamond thin films. The system is similar to those developed by others but includes several unique features that make it particularly economical and safe, yet capable of producing high quality diamond films. A 2.45-GHz magnetron from a commercial microwave oven is used as the microwave power source. A conventional mixture of 0.2% methane in hydrogen is ionized in a bell jar reaction chamber located within a simple microwave cavity. By using a small hydrogen reservoir adjacent to the gas supply, an empty hydrogen tank can be replaced without interrupting film synthesis or causing any drift in plasma characteristics. Hence films can be deposited continuously for arbitrarily long periods while storing only a 24-h supply of explosive gases. System interlocks provide safe start-up and shut-down and allow unsupervised operation. Here we describe the electrical, microwave, and mechanical aspects of the system, and summarize the performance of the facility as used to reproducibly synthesize high quality diamond thin films.
引用
收藏
页码:3389 / 3393
页数:5
相关论文
共 25 条
[1]   SPATIALLY RESOLVED RAMAN STUDIES OF DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].
AGER, JW ;
VEIRS, DK ;
ROSENBLATT, GM .
PHYSICAL REVIEW B, 1991, 43 (08) :6491-6499
[2]   DIAMONDS FROM THE VAPOR-PHASE [J].
BACHMANN, P .
PHYSICS WORLD, 1991, 4 (04) :32-36
[3]  
BACHMANN P, 1988, DIAMOND RELATED MATE, V2
[4]   CRYSTALLIZATION OF DIAMOND CRYSTALS AND FILMS BY MICROWAVE ASSISTED CVD .2. [J].
BADZIAN, AR ;
BADZIAN, T ;
ROY, R ;
MESSIER, R ;
SPEAR, KE .
MATERIALS RESEARCH BULLETIN, 1988, 23 (04) :531-548
[5]  
BOU P, 1989, ELECTROCHEM SOC P, V89, P610
[6]  
HAWKINS DT, 1981, CHEM VAPOR DEPOSITIO
[7]   DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].
KAMO, M ;
SATO, Y ;
MATSUMOTO, S ;
SETAKA, N .
JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644
[8]   EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS [J].
KAWATO, T ;
KONDO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1429-1432
[9]   CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].
KNIGHT, DS ;
WHITE, WB .
JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393
[10]   SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS [J].
KOBASHI, K ;
NISHIMURA, K ;
KAWATE, Y ;
HORIUCHI, T .
PHYSICAL REVIEW B, 1988, 38 (06) :4067-4084