ONE-STEP 3D SHAPING USING A GRAY-TONE MASK FOR OPTICAL AND MICROELECTRONIC APPLICATIONS

被引：96

作者：

OPPLIGER, Y

SIXT, P

STAUFFER, JM

MAYOR, JM

REGNAULT, P

VOIRIN, G

机构：

来源：

MICROELECTRONIC ENGINEERING | 1994年 / 23卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(94)90193-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel approach based on the use of gray-tone masks to shape arbitrary profiles is described. Tapered structures in thick polyimide as well as blazed gratings and Fresnel microlenses in fused silica substrates have been fabricated. The 3D shaping capability of this technology is illustrated by a high efficiency of 75% obtained for the lenses. This technology involves one appropriate mask, a photolithographic exposure and an etching step; it is realized on conventional equipment and is therefore cost effective.

引用

页码：449 / 454

页数：6