DEVELOPMENT OF A SECOND GENERATION SCANNING PHOTOEMISSION MICROSCOPE WITH A ZONE-PLATE GENERATED MICROPROBE AT THE NATIONAL SYNCHROTRON LIGHT-SOURCE

We have been developing an instrument that combines the techniques of x-ray photoelectron spectroscopy and zone plate microfocusing to perform spectromicroscopy. The X1A undulator provides a bright photon source in the soft x-ray range with a high degree of spatial coherence (a requirement for zone plate focusing). A spherical grating monochromator selects the desired photon energy in the 280-800 eV range. A Fresnel zone plate focuses the beam to a small spot. Photoelectron spectra can be acquired from the small irradiated area with an electron energy analyzer. With the beam focused on the surface and the sample mechanically scanned, element-specific or chemical-state-specific images of the surface can be obtained. © 1995 American Institute of Physics.