PREPARATION OF GRIDS FOR FAR INFRARED FILTERS

被引:6
作者
ULRICH, R
机构
来源
APPLIED OPTICS | 1969年 / 8卷 / 02期
关键词
D O I
10.1364/AO.8.000319
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Capacitive grids and similar structures, to be used as reflectors in far ir interference filters, are prepared from a 1-µ thick copper layer supported by a 2.5-µ thick dielectric film. The desired pattern is obtained by simple photolithographic contact printing of a suitable negative. The essential steps of this preparation and the generation of some relevant patterns are described. © 1969 Optical Society of America.
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页码:319 / &
相关论文
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[3]  
RESSLER GM, 1966, APPL OPT, V6, P893
[4]   INTERFERENCE FILTERS FOR FAR INFRARED [J].
ULRICH, R .
APPLIED OPTICS, 1968, 7 (10) :1987-&
[5]   EFFECTIVE LOW-PASS FILTERS FOR FAR INFRARED FREQUENCIES [J].
ULRICH, R .
INFRARED PHYSICS, 1967, 7 (02) :65-+
[6]  
1966, P79 EASTM KOD CO PUB