Sputtering and secondary electron emission of metals bombarded by argon ions

被引:15
作者
Timoshenko, G [1 ]
机构
[1] Massachusetts Inst Technol, Dept Elect Engn, Cambridge, MA USA
关键词
D O I
10.1063/1.1712854
中图分类号
O59 [应用物理学];
学科分类号
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页码:69 / 77
页数:9
相关论文
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