THEORETICAL AND EXPERIMENTAL CHARACTERIZATION OF POSITIVE-COLUMN PLASMAS IN OXYGEN GLOW-DISCHARGE

被引：20

作者：

ICHIKAWA, Y ^{[1
]}

WU, RLC ^{[1
]}

KANEDA, T ^{[1
]}

机构：

[1] TOKYO DENKI UNIV,DEPT ELECTR ENGN,TOKYO 101,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 01期

关键词：

D O I：

10.1063/1.345288

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectrometer was used to measure relative concentrations of charged particles. These experimental results were found to be in good agreement with the present theoretical calculations based on a slightly ionized stationary plasma model.

引用

页码：108 / 114

页数：7

共 36 条

[1] ION-ION MUTUAL NEUTRALIZATION CROSS SECTIONS MEASURED BY A SUPERIMPOSED BEAM TECHNIQUE [J].