PBTIO3 FERROELECTRIC THIN-FILMS AND THEIR PYROELECTRIC APPLICATION

A series of technical data for preparing PbTiO3 and La-modified PbTiO3 films by using various deposition methods such as rf sputtering and chemical vapor deposition are described. The resulting thin films show very good ferroelectric, pyroelectric, piezoelectric and electrooptic properties. Infrared sensors using the films show good voltage responsivity, detectivity and fast response, and, in particular, c-axis oriented films have excellent characteristics. The film prepared on Si wafers can be directly combined with active devices such as FET's and bipolar transistors. Sensitivity of the films on Si and MgO substrates has been increased considerably by removing the substrate beneath the sensitive area with chemical etching. Linear and two-dimensional arrays have been developed on some types of the substrates and their basic characteristics have been investigated for improving sensitivity resolution. Infrared imaging has also been tried by using the array sensors. © 1991, Taylor & Francis Group, LLC. All rights reserved.