KINETICS AND INITIAL-STAGES OF OXIDATION OF ALUMINUM NITRIDE - THERMOGRAVIMETRIC ANALYSIS AND X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY

被引:115
作者
KATNANI, AD
PAPATHOMAS, KI
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574765
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1335 / 1340
页数:6
相关论文
共 10 条
[1]   LUMINESCENCE IN THE SYSTEM AL2O3-AIN [J].
ADAMS, I ;
AUCOIN, TR ;
WOLFF, GA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (11) :1050-1054
[2]  
BRUNIUX E, 1986, J MATER, V22, P541
[3]  
COOPER CF, 1963, SPEC CERAM, P49
[4]  
KATNANI AD, IBM TR01A070 TECHN R
[5]  
Kingery WD, 1960, INTRO CERAMICS
[6]  
KOHN JA, 1956, AM MINERAL, V41, P355
[7]  
KOMEYA K, 1969, J CERAM ASS JPN, V77, P136
[8]  
LONG G, 1959, J AM CERAM SOC, V42, P5
[9]  
RASMUSSEN BA, 1973, AD770038 REP
[10]   SOME PROPERTIES OF ALUMINUM NITRIDE [J].
TAYLOR, KM ;
LENIE, C .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (04) :308-314