COMPARISON OF THE EFFECT OF ARGON AND HYDROGEN-ION BOMBARDMENT ON THE DIAMOND-(100) SURFACE AS STUDIED BY AES AND EELS

被引：34

作者：

HOFFMAN, A ^{[1
]}

PATERSON, PJK ^{[1
]}

PRAWER, S ^{[1
]}

机构：

[1] ROYAL MELBOURNE INST TECHNOL,MICROELECTR & MAT RES CTR,MELBOURNE,VIC 3001,AUSTRALIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 52卷 / 01期

关键词：

D O I：

10.1016/0168-583X(90)90602-Q

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The influence of 1.5 keV argon and hydrogen ion bombardment on the diamond (100) near-surface region is reported. Based on a comparison between the C(KLL) Auger and EEL spectra of different carbon allotropes it was possible to determine that irradiation doses of 1.6 × 1015 and 1.6 × 1016 H+2 cm2 at 1.5 keV were found to produce an amorphous surface region. By contrast Ar+ irradiation at the same dose and energy was found to induce a surface region rich in graphite-like sp2 bonds. © 1990.

引用

页码：63 / 67

页数：5

共 14 条

[1]

ANGUS JC, 1988, PLASMA DEPOSITED THI

[2]

FIELD FH, 1970, ELECTRON IMPACT PHEN, pCH5

[3]

HAAS TW, 1972, J APPL PHYS, V43, P853

[4]

Jenkins G. M., 1976, POLYM CARBONS CARBON

[5] DIAMOND SURFACE .2. SECONDARY-ELECTRON EMISSION [J].

LURIE, PG ;

WILSON, JM .

SURFACE SCIENCE, 1977, 65 (02) :476-498

[6]

LURIE PG, 1977, SURF SCI, V65, P45

[7] INVESTIGATION OF BAND-STRUCTURE OF DIAMOND USING LOW-ENERGY ELECTRONS [J].

MAGUIRE, HG .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1976, 76 (02) :715-726

[8] CRYSTALLINITY AND STRENGTH OF DIAMOND BOMBARDED WITH LOW-ENERGY ION-BEAMS [J].

MIYAMOTO, I ;

NISHIMURA, K ;

KAWATA, K ;

KAWARADA, H ;

SHIMADA, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :689-691

[9] STRUCTURAL INVESTIGATION OF HELIUM ION-BEAM-IRRADIATED GLASSY-CARBON [J].

PRAWER, S ;

ROSSOUW, CJ .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (09) :4435-4439

[10]

ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911

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