OPTICAL INTERFERENCE FILTERS WITH CONTINUOUS REFRACTIVE-INDEX MODULATIONS BY MICROWAVE PLASMA-ASSISTED CHEMICAL-VAPOR DEPOSITION

被引：19

作者：

GREENHAM, AC ^{[1
]}

NICHOLS, BA ^{[1
]}

WOOD, RM ^{[1
]}

NOURSHARGH, N ^{[1
]}

LEWIS, KL ^{[1
]}

机构：

[1] DEF RES AGCY,MALVERN WR14 3PS,WORCS,ENGLAND

来源：

OPTICAL ENGINEERING | 1993年 / 32卷 / 05期

关键词：

OPTICAL INTERFERENCE FILTERS; REFRACTIVE INDEX MODULATIONS; CHEMICAL VAPOR DEPOSITION;

D O I：

10.1117/12.130253

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Optical interference filters that have continuously modulated refractive indices throughout their thicknesses (rugates) are designed and fabricated using a microwave plasma-assisted chemical vapor deposition technique. Examples are shown of single- and double-response narrow-band reflection filters made from variable composition silicon oxynitride deposited on silica. Reflectivities in excess of 99.9% have been realized with bandwidths in the 2 to 10% range.

引用

页码：1018 / 1024

页数：7

共 6 条

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HALL, RL ;

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GLUCK, NS .

APPLIED OPTICS, 1989, 28 (14) :2945-2948

[3]

NICHOLS BA, 1985, Patent No. 2149779

[4] RUGATE FILTER SIDELOBE SUPPRESSION USING QUINTIC AND RUGATED QUINTIC MATCHING LAYERS [J].

SOUTHWELL, WH ;

HALL, RL .

APPLIED OPTICS, 1989, 28 (14) :2949-2951

[5] USING APODIZATION FUNCTIONS TO REDUCE SIDELOBES IN RUGATE FILTERS [J].

SOUTHWELL, WH .

APPLIED OPTICS, 1989, 28 (23) :5091-5094

[6]

WOOD RM, 1990, P BOULD DAM S SPIE, V1441, P316

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