SILICA-BASED OPTICAL WAVE-GUIDE ON TERRACED SILICON SUBSTRATE AS HYBRID INTEGRATION PLATFORM

被引：86

作者：

YAMADA, Y

TAKAGI, A

OGAWA, I

KAWACHI, M

KOBAYASHI, M

机构：

[1] NTT Opto-electronics Laboratories, Tokai-mura

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 05期

关键词：

OPTICAL WAVE-GUIDES; INTEGRATED OPTICS;

D O I：

10.1049/el:19930297

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.

引用

页码：444 / 446

页数：3

共 7 条

[1] PASSIVE COUPLING OF INGAASP/INP LASER ARRAY AND SINGLEMODE FIBERS USING SILICON WAFERBOARD
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[5] SILICA WAVE-GUIDES ON SILICON AND THEIR APPLICATION TO INTEGRATED-OPTIC COMPONENTS
KAWACHI, M
[J]. OPTICAL AND QUANTUM ELECTRONICS, 1990, 22 (05) : 391 - 416
[6] HYBRID-INTEGRATED 4 X 4 OPTICAL GATE MATRIX SWITCH USING SILICA-BASED OPTICAL WAVE-GUIDES AND LD ARRAY CHIPS
YAMADA, Y
TERUI, H
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YAMADA, M
HIMENO, A
KOBAYASHI, M
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (03) : 383 - 390
[7] YAMADA Y, 1989, OPT ENG, V28, P1281, DOI 10.1117/12.7977144

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