SPUTTERING OF URANIUM TETRAFLUORIDE IN THE ELECTRONIC STOPPING REGION

被引：90

作者：

GRIFFITH, JE

WELLER, RA

SEIBERLING, LE

TOMBRELLO, TA

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1980年 / 51卷 / 3-4期

关键词：

Compendex;

D O I：

10.1080/00337578008210004

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

SPUTTERING

引用

页码：223 / 232

页数：10

共 20 条

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[2]

BIERSACK JP, 1976, NUCL INSTRUM METHODS, V132, P229, DOI 10.1016/0029-554X(76)90739-4

[3]

BROWN W, UNPUBLISHED

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BROWN, WL ;

LANZEROTTI, LJ ;

POATE, JM ;

AUGUSTYNIAK, WM .

PHYSICAL REVIEW LETTERS, 1978, 40 (15) :1027-1030

[5]

CHAPMAN GE, 1972, RADIAT EFF, V13, P121

[6]

DUCK PW, UNPUBLISHED

[7]

FLEISCHER RL, 1975, NUCLEAR TRACKS SOLID

[8] APPLICATION OF TRACK DETECTORS TO MEASUREMENT OF SPUTTERING YIELDS [J].

GREGG, R ;

SWITKOWSKI, ZE ;

TOMBRELLO, TA .

NUCLEAR INSTRUMENTS & METHODS, 1977, 144 (03) :613-614

[9]

GRIFFITH JE, 1979, THESIS CALIFORNIA I

[10] POSSIBLE NEW SPUTTERING MECHANISM IN TRACK REGISTERING MATERIALS [J].

HAFF, PK .

APPLIED PHYSICS LETTERS, 1976, 29 (08) :473-475

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