RESHARPENING EFFECT OF ALAS AND FABRICATION OF QUANTUM-WIRES ON V-GROOVED SUBSTRATES BY MOLECULAR-BEAM EPITAXY

被引:44
作者
SHEN, XQ
TANAKA, M
NISHINAGA, T
机构
[1] Department of Electronic Engineering, Faculty of Engineering, The University of Tokyo, Bunkyo-ku, Tokyo, 113
关键词
D O I
10.1016/0022-0248(93)90763-M
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The resharpening effect of AlAs grown on V-grooved substrates by MBE was first observed. The surface diffusions in GaAs/AlAs and InGaAs/AlAs heterostructures were also studied by high-resolution scanning electron microscope (SEM). With the measurement of PL at 77 K and the observation of high-resolution SEM, it was found that multiple GaAs/AlAs quantum-wires with a size of about 140-160 angstrom X 400-600 angstrom at the bottom of the V-grooves were formed. From the results, a new way of fabricating GaAs/AlAs and InGaAs/AlAs multiple quantum-wires at the bottom of V-grooves by MBE was proposed.
引用
收藏
页码:932 / 936
页数:5
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