VACUUM-ULTRAVIOLET EMISSION FROM MICROWAVE PLASMAS OF HYDROGEN AND ITS MIXTURES WITH HELIUM AND OXYGEN

被引：38

作者：

HOLLANDER, A

WERTHEIMER, MR

机构：

[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] FRAUNHOFER INST ANGEW POLYMERFORSCH,D-14513 TELTOW,GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 03期

关键词：

D O I：

10.1116/1.579271

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The vacuum ultraviolet (VUV) and ultraviolet (UV) emission (112 nm less-than-or-equal-to lambda less-than-or-equal-to 300 nm) from hydrogen-containing microwave plasmas have been investigated, in particular the influence of plasma parameters such as gas composition, pressure, and microwave power. Helium-hydrogen plasma emits a very intense hydrogen Lyman alpha radiation at 121.5 nm, which is up to 40 times more intense than other lines in the spectrum. Hydrogen-oxygen plasma displays an emission which, within a selected range of the plasma parameters, resembles the absorption of molecular oxygen. We briefly discuss the usefulness of these emissions for investigating the UV photochemistry of polymers.

引用

页码：879 / 882

页数：4

共 15 条

[1] LABORATORY STUDIES OF UV EMISSIONS OF H-2 BY ELECTRON-IMPACT - THE WERNER-BAND AND LYMAN-BAND SYSTEMS [J].

AJELLO, JM ;

SRIVASTAVA, SK ;

YUNG, YL .

PHYSICAL REVIEW A, 1982, 25 (05) :2485-2498

[2]

D'Agostino R., 1990, PLASMA DEPOSITION TR

[3] INTENSE VACUUM ULTRAVIOLET ATOMIC LINE SOURCES [J].

DAVIS, D ;

BRAUN, W .

APPLIED OPTICS, 1968, 7 (10) :2071-&

[4]

GERGE RA, 1972, J PHYS C SOLID STATE, V5, P871

[5]

HOLLANDER A, IN PRESS MACROMOLECU

[6] SURFACE CROSSLINKING OF POLYETHYLENE PRODUCED BY ULTRAVIOLET-RADIATION FROM A HYDROGEN GLOW-DISCHARGE [J].

HUDIS, M ;

PRESCOTT, LE .

JOURNAL OF POLYMER SCIENCE PART B-POLYMER LETTERS, 1972, 10 (03) :179-&

[7]

HUDIS M, 1972, J APPL POLYM SCI, V16, P2397, DOI 10.1002/app.1972.070160918

[8]

NOYES WA, 1966, PHOTOCHEM GASES, P248

[9]

Onari S., 1969, Journal of the Physical Society of Japan, V26, P500, DOI 10.1143/JPSJ.26.500

[10] VACUUM-ULTRAVIOLET ABSORPTION SPECTRUM OF POLYSTYRENE [J].

PARTRIDG.RH .

JOURNAL OF CHEMICAL PHYSICS, 1967, 47 (10) :4223-&

← 1 2 →