PRECISE ALIGNMENT THROUGH THICK WAFERS USING AN OPTICAL COPYING TECHNIQUE

被引：8

作者：

JAHNS, J

DASCHNER, W

机构：

[1] AT and T Bell Laboratories, Holmdel, NJ, 07733, Crawfords Corner Road

[2] Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, CA

来源：

OPTICS LETTERS | 1992年 / 17卷 / 06期

关键词：

D O I：

10.1364/OL.17.000390

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Submicrometer alignment of two mask patterns on the top and the bottom surface of a thick glass substrate is possible by using optical copying. The optical copying step transfers an alignment pattern from one surface to the other by shadow casting or Fresnel propagation. In a demonstration experiment, the alignment between the two surfaces of a 3-mm-thick quartz glass substrate was achieved with a precision of 0.5-0.7-mu-m.

引用

页码：390 / 392

页数：3

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