EFFECT OF GLOW-DISCHARGE TREATMENT OF SUBSTRATES ON PARYLENE-SUBSTRATE ADHESION

被引：35

作者：

SHARMA, AK

YASUDA, H

机构：

[1] UNIV MISSOURI,DEPT CHEM ENGN,ROLLA,MO 65401

[2] UNIV MISSOURI,GRAD CTR MAT RES,ROLLA,MO 65401

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 04期

关键词：

D O I：

10.1116/1.571880

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：994 / 998

页数：5

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