NEW COLLISION THEORY OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES

被引:50
作者
HENSCHKE, EB
机构
来源
PHYSICAL REVIEW | 1957年 / 106卷 / 04期
关键词
D O I
10.1103/PhysRev.106.737
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:737 / 753
页数:17
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