FABRICATION OF 104 BIT PERMALLOY-FIRST MAGNETIC BUBBLE CIRCUITS ON EPITAXIAL GARNET CHIPS

被引：3

作者：

REEKSTIN, JP ^{[1
]}

LEHNER, AG ^{[1
]}

VRATNY, F ^{[1
]}

KAMMLOTT, GW ^{[1
]}

机构：

[1] BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 05期

关键词：

D O I：

10.1116/1.1318440

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Major processing problems in the fabrication of magnetic bubble circuits are discussed in relation to the dielectric layer, permalloy film, and current-carrying conductors. Scanning electron micrographs show etch pattern profiles and composite features as arising from multiple depositions.

引用

页码：847 / 851

页数：5

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