ELECTRICAL CONDUCTION IN SINGLE-CRYSTAL ALUMINUM THIN FILMS

被引：17

作者：

JAYADEVAIAH, TS

KIRBY, RE

机构：

[1] Department of Electrical Engineering, Institute for Surface Studies, University of Wisconsin - Milwaukee, Milwaukee

[2] Department of Physics, Institute for Surface Studies, University of Wisconsin - Milwaukee, Milwaukee

来源：

APPLIED PHYSICS LETTERS | 1969年 / 15卷 / 05期

关键词：

D O I：

10.1063/1.1652945

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electrical conduction in thin (400-1500 Å) single-crystal aluminum films vacuum evaporated on NaCl substrates is explained by a simple model and verified by experimental results. The resistivity of the inter-island boundaries is accounted for by considering the film structure as a metal - insulator matrix and calculating its equivalent resistivity. An unambiguous comparison can then be made with the Fuchs - Sondheimer theory of size-affected conduction in thin metal films only after subtracting off the resistivity contribution due to interisland boundaries. © 1969 The American Institute of Physics.

引用

页码：150 / +

页数：1

共 11 条

[1]

ADAMSKY RF, 1966, USE THIN FILMS PHYSI

[2] INTERPRETATION OF HALL AND PHOTO-HALL EFFECTS IN INHOMOGENEOUS MATERIALS [J].

BUBE, RH .

APPLIED PHYSICS LETTERS, 1968, 13 (04) :136-&

[3]

CAMPBELL DS, 1966, USE THIN FILMS PHYSI, P299

[4] ELECTRICAL SIZE EFFECT IN ALUMINUM [J].

FORSVOLL, K ;

HOLWECH, I .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (08) :2230-&

[5] The conductivity of thin metallic films according to the electron theory of metals [J].

Fuchs, K .

PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1938, 34 :100-108

[6] INTRINSIC RESISTIVITY AND ELECTRON MEAN FREE PATH IN ALUMINUM FILMS [J].

MAYADAS, AF .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (09) :4241-&

[7] ELECTRICAL CONDUCTION OF THIN METALLIC FILMS WITH ROUGH SURFACE [J].

NAMBA, Y .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (13) :6117-&

[8] ELECTRICAL CONDUCTION MECHANISM IN ULTRATHIN, EVAPORATED METAL FILMS [J].

NEUGEBAUER, CA ;

WEBB, MB .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (01) :74-&

[9] THE MEAN FREE PATH OF ELECTRONS IN METALS [J].

SONDHEIMER, EH .

ADVANCES IN PHYSICS, 1952, 1 (01) :1-42

[10]

SWANSON JG, 1968, THIN SOLID FILMS, V1, P325

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