PLASMA SOURCE ION-IMPLANTATION - A NEW, COST-EFFECTIVE, NON-LINE-OF-SIGHT TECHNIQUE FOR ION-IMPLANTATION OF MATERIALS

被引：97

作者：

CONRAD, JR

DODD, RA

WORZALA, FJ

QIU, X

机构：

[1] UNIV WISCONSIN,DEPT MAT SCI & ENGN,MADISON,WI 53706

[2] UNIV WISCONSIN,MAT SCI PROGRAM,MADISON,WI 53706

来源：

SURFACE & COATINGS TECHNOLOGY | 1988年 / 36卷 / 3-4期

关键词：

D O I：

10.1016/0257-8972(88)90033-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：927 / 937

页数：11

共 16 条

[1]

Conrad J.R., 1986, B AM PHYS SOC, V31, P1479

[2] SHEATH THICKNESS AND POTENTIAL PROFILES OF ION-MATRIX SHEATHS FOR CYLINDRICAL AND SPHERICAL ELECTRODES [J].

CONRAD, JR .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) :777-779

[3] PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS [J].

CONRAD, JR ;

RADTKE, JL ;

DODD, RA ;

WORZALA, FJ ;

TRAN, NC .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4591-4596

[4]

CONRAD JR, 1987, 1987 IEEE INT C PLAS, P124

[5]

CONRAD JR, 1986, 39TH ANN GAS EL C MA, P75

[6]

CONRAD JR, 1986, 1986 IEEE INT C PLAS, P28

[7] WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS [J].

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KOBS, K ;

LEUTENECKER, R ;

RYSSEL, H ;

EICHINGER, P .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :181-190

[8] A STUDY OF THE IMPROVED WEAR PERFORMANCE OF NITROGEN-IMPLANTED TI-6AL-4V [J].

HUTCHINGS, R ;

OLIVER, WC .

WEAR, 1983, 92 (01) :143-153

[9] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[10]

MAYER JW, 1979, ION IMPLANTATION MET, P37

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