SILICON FIELD-EFFECT TRANSISTOR BASED ON QUANTUM TUNNELING

被引:135
作者
TUCKER, JR [1 ]
WANG, CL [1 ]
CARNEY, PS [1 ]
机构
[1] UNIV ILLINOIS,BECKMAN INST,URBANA,IL 61801
关键词
D O I
10.1063/1.112250
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter explores regulation of current flow within a silicon field-effect transistor by gate-induced tunneling through a Schottky barrier located at the interface between a metallic source electrode and the Si channel. The goal here is to forestall short-channel effects which are expected to prevent further size reductions in conventional devices when linewidths reach approximately 1000 angstrom. Control of tunneling appears to be possible at minimum channel lengths L approximately 250 angstrom or less while simultaneously eliminating the need for large-area source and drain contacts, so that scaling of Si transistors could be significantly extended if this principle proves technically feasible.
引用
收藏
页码:618 / 620
页数:3
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