EFFECTS OF HYDROGEN GAS ON PALLADIUM LB FILM SILICON MIS DEVICES

被引：10

作者：

EVANS, NJ ^{[1
]}

ROBERTS, GG ^{[1
]}

PETTY, MC ^{[1
]}

机构：

[1] UNIV DURHAM,DEPT APPL PHYS & ELECTR,DURHAM DH1 3LE,ENGLAND

来源：

SENSORS AND ACTUATORS | 1989年 / 16卷 / 03期

关键词：

D O I：

10.1016/0250-6874(89)87007-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：255 / 261

页数：7

共 7 条

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[6] SI-SIO2 INTERFACE - ELECTRICAL PROPERTIES AS DETERMINED BY METAL-INSULATOR-SILICON CONDUCTANCE TECHNIQUE [J].

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[7]

ROBERTS GG, 1983, 1983 INFOS C P, P20

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