GRAIN-ORIENTED FERROELECTRIC PZT THIN-FILMS ON LATTICE-MATCHED SUBSTRATES

被引：7

作者：

NEURGAONKAR, RR ^{[1
]}

SANTHA, IS ^{[1
]}

OLIVER, JR ^{[1
]}

NELSON, JG ^{[1
]}

CHEUNG, JT ^{[1
]}

MORGAN, PED ^{[1
]}

UDAYAKUMAR, KR ^{[1
]}

机构：

[1] PENN STATE UNIV,UNIV PK,PA 16802

来源：

MATERIALS RESEARCH BULLETIN | 1993年 / 28卷 / 07期

关键词：

THIN FILMS; FERROELECTRIC MATERIALS; SOL-GELS;

D O I：

10.1016/0025-5408(93)90115-T

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The sol-gel technique has been used to produce highly grain-oriented perovskite PZT thin films on lattice-matched SBN:60, SrTiO3 and MgO substrates. These films were deposited on both La0.5Sr0.5CoO3 (LSC) laser ablated-coated and uncoated substrates and annealed in the range of 630-675-degrees-C in an air or oxygen atmosphere. In all cases the PZT thin films were highly crystalline and oriented, with dielectric constants higher than 1100. The measured remanent polarization in these films exceeded 18 mucoul/cm2 indicating the potential for strong electro-optic and piezoelectric effects.

引用

页码：719 / 727

页数：9

共 19 条

[1]

CHEUNG JT, COMMUNICATION

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