EFFECT OF ULTRAVIOLET-LIGHT ON FATIGUE OF LEAD-ZIRCONATE-TITANATE THIN-FILM CAPACITORS

被引：45

作者：

LEE, J ^{[1
]}

ESAYAN, S ^{[1
]}

SAFARI, A ^{[1
]}

RAMESH, R ^{[1
]}

机构：

[1] BELLCORE,RED BANK,NJ 07701

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 02期

关键词：

D O I：

10.1063/1.112617

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fatigue of Pb(Zr0.52Ti0.48)O3 (PZT) thin-film capacitors was studied under UV light (He-Cd laser, lambda=325 nm). The remanent polarization of the PZT film capacitors increased upon light illumination. Fatigue resistance was also improved under UV light. During fatigue test, the change in polarization of PZT films upon UV light illumination increased gradually with cycling. These results were examined within the framework of the polarization screening model, which is suggested as an essential process for fatigue. This leads to a conclusion that more charged defects are involved in the fatigue process through internal screening of polarization.

引用

页码：254 / 256

页数：3

共 26 条

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