RADIO-FREQUENCY REACTIVE SPUTTERED IRON NITRIDES USING AMMONIA GAS - STRUCTURE AND MAGNETIC-PROPERTIES

被引：48

作者：

XIAO, JQ

CHIEN, CL

机构：

[1] Department of Physics and Astronomy, Johns Hopkins University, Baltimore

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.111155

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Iron nitrides of gamma'-Fe4N, epsilon-Fe2-3N, and zeta-Fe2N have been fabricated using rf sputtering with reactive NH3 gas, which offers significant advantages over the conventional N2 gas. All but zeta-Fe2N nitride films have relative high saturation moments with a large in-plane anisotropy. The Mossbauer results are consistent with structural analyses and those from bulk samples.

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页码：384 / 386

页数：3

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