THE MEASUREMENT AND UNCERTAINTY OF A CALIBRATION STANDARD FOR THE SCANNING ELECTRON-MICROSCOPE

被引：13

作者：

FU, J ^{[1
]}

CROARKIN, MC ^{[1
]}

VORBURGER, TV ^{[1
]}

机构：

[1] NATL INST STAND & TECHNOL, COMP & APPL MATH LAB, DIV STAT ENGN, GAITHERSBURG, MD 20899 USA

来源：

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1994年 / 99卷 / 02期

关键词：

INTERFEROMETER; PRECISION; RANDOM ERROR; SYSTEMATIC ERROR; SRM; UNCERTAINTY;

D O I：

10.6028/jres.099.015

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 x to 2000O x. Seven issues, SRM484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM484 and illustrates with data from issues 484e and 484f.

引用

页码：191 / 199

页数：9

共 17 条

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[4]

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[8]

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[9]

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[10]

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