SECONDARY ION MASS-SPECTROMETRIC IMAGE DEPTH PROFILING FOR 3-DIMENSIONAL ELEMENTAL ANALYSIS

被引：45

作者：

PATKIN, AJ ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT CHEM,ITHACA,NY 14853

来源：

ANALYTICAL CHEMISTRY | 1982年 / 54卷 / 01期

关键词：

D O I：

10.1021/ac00238a005

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

收藏

页码：2 / 5

页数：4

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