ATOMIC-STRUCTURE OF BETA-SIC(100) SURFACES - AN AB-INITIO STUDY

被引:72
作者
YAN, H
SMITH, AP
JONSSON, H
机构
[1] UNIV WASHINGTON,DEPT MAT SCI & ENGN,FB-10,SEATTLE,WA 98195
[2] UNIV WASHINGTON,DEPT CHEM,BG-10,SEATTLE,WA 98195
基金
美国国家科学基金会;
关键词
CHEMICAL VAPOR DEPOSITION; DENSITY FUNCTIONAL CALCULATIONS; EPITAXY; HYDROGEN; LOW INDEX SINGLE CRYSTAL SURFACES; SILICON CARBIDE; SURFACE ENERGY; SURFACE RELAXATION AND RECONSTRUCTION;
D O I
10.1016/0039-6028(95)00250-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We examine several different reconstructions of the beta-SiC(100) surface by the ab initio Car-Parrinello method. Our results confirm that the lowest energy c(2 X 2) reconstructed surface consists of triply bonded carbon dimers in a bridging position between neighboring underlying silicon dimers. Added hydrogen atoms bond to the carbon dimers, resulting in a lengthened double-bonded dimer, and a larger separation for the underlying silicon dimers, although those Si bonds do not disappear. The most stable structure found for the (3 X 2) reconstructed surface with a 1/3 monolayer excess of silicon is an alternate dimer row structure rather than the added dimer row model proposed by others. The energetics of various surface reactions that may be involved in growth of SiC are discussed.
引用
收藏
页码:265 / 275
页数:11
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