SIMOX MATERIAL MANUFACTURABILITY

被引:13
作者
MARGAIL, J
机构
[1] LETI (CEA - Technologie Avancées), DMEL - CENG, F38041 Grenoble Cedex
关键词
D O I
10.1016/0168-583X(93)95011-S
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In the last ten years, ion beam synthesis has become a significant part of ion beam science. In this paper, the manufacturing aspects of SIMOX material are reviewed.
引用
收藏
页码:41 / 46
页数:6
相关论文
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