REACTIVE SPUTTERING OF MOLYBDENUM

被引：24

作者：

JANKOWSKI, AF

SCHRAWYER, LR

机构：

[1] Lawrence Livermore National Laboratory, Livermore

来源：

THIN SOLID FILMS | 1990年 / 193卷 / 1-2期

关键词：

D O I：

10.1016/S0040-6090(05)80012-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The composition and crystalline structure of molybdenum oxide thin films is controlled through the process of reactive d.c. magnetron sputtering. A systematic variation in target power density results in a continuous transition in the appearance of molybdenum oxide from a translucent glass to a metallic-like film. New molybdenum oxide crystal structures and compositions are found using X-ray diffraction, selected area diffraction, Auger electron spectroscopy depth profiling and scanning transmission electron microscopy.

引用

收藏

页码：61 / 71

页数：11

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