ANALYSIS OF SURFACE-LAYERS BY LIGHT ION BACKSCATTERING AND SPUTTERING COMBINED WITH AUGER-ELECTRON SPECTROSCOPY (AES)

被引：19

作者：

BEHRISCH, R ^{[1
]}

SCHERZER, BM ^{[1
]}

STAIB, P ^{[1
]}

机构：

[1] EUROPEAN ATOM ENERGY COMMUNITY ASSOC, MAX PLANCK INST PLASMAPHYS, W-8046 GARCHING, WEST GERMANY

来源：

THIN SOLID FILMS | 1973年 / 19卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90024-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：57 / 67

页数：11

相关论文

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