ROOM-TEMPERATURE PUMPING CHARACTERISTICS OF A ZR-AL NONEVAPORABLE GETTER FOR INDIVIDUAL GASES

被引：30

作者：

BENVENUTI, C

FRANCIA, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.575541

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2528 / 2534

页数：7

共 13 条

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