EFFECTS OF PLATINUM CONTENT AND SUBSTRATE BIAS ON THE STRUCTURE AND MAGNETIC-PROPERTIES OF COCRPT/CR THIN-FILMS

The effects of the Pt content (0-40 at. %) and the developed dc substrate bias voltage (0 to -190 V) on the magnetic properties and structure of rf sputtered CoCrPt/Cr films with two different remanent magnetization-thickness products M(r)delta (0.7 and 2.3 memu/cm2) were studied. It was demonstrated that a wide range of in-plane coercivities (500-3450 Oe) can be easily obtained in these films. The addition of Pt affected the magnetic properties of the films through changes of the lattice parameter, texture, and phase composition. A maximum in the in-plane coercivity exists for moderate amounts of Pt. The saturation magnetization decreased monotonically with increasing Pt content. rf substrate bias increased the in-plane coercivity and altered the character of the magnetic interactions through changes of the stress, texture and microstructure of the magnetic layer.