REMARKS ON CALCULATION OF ENERGY-LOSS IN ELECTRON-RESIST FILMS ON SUBSTRATES

被引：10

作者：

MURATA, K

KOTERA, M

NAGAMI, K

机构：

[1] Electronics Department, College of Engineering, University of Osaka Prefecture

来源：

关键词：

D O I：

10.1143/JJAP.17.1671

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

[No abstract available]

引用

页码：1671 / 1672

页数：2

相关论文

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