DIGITAL CANCELLATION OF NOISE AND OFFSET FOR CAPACITIVE SENSORS

被引：5

作者：

KUNG, JT ^{[1
]}

MILLS, RN ^{[1
]}

LEE, HS ^{[1
]}

机构：

[1] MIT,DEPT ELECT ENGN & COMP SCI,MICROSYST TECHNOL LABS,CAMBRIDGE,MA 02139

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1993年 / 42卷 / 05期

关键词：

D O I：

10.1109/19.252532

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A digital noise and offset cancellation technique for use with charge-redistribution capacitance sense techniques is presented. It is insensitive to parasitic capacitances, and can cancel the effects of offsets, low-frequency noise sources, and sampled kT/C noise of the MOS switch used in the topology. It represents a significant improvement in capacitance resolution than previous methods. It is currently being used in the readout circuits of experimental pressure sensor chips containing 100 fF air-gap capacitors with a resolution in the 30 aF range at a sampling speed of 11 kHz.

引用

页码：939 / 942

页数：4

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