ELECTRICAL PROPERTIES OF TITANIUM ZIRCONIUM AND HAFNIUM FILMS FROM 300 DEGREES K TO 1.3 DEGREES K

被引：14

作者：

FRIEBERTSHAUSER, PE

MCCAMONT, JW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.1492655

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：184 / +

页数：1

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