LASER REORDERING OF IMPLANTED AMORPHOUS LAYERS IN GAAS

被引:31
作者
CAMPISANO, SU
CATALANO, I
FOTI, G
RIMINI, E
EISEN, F
NICOLET, MA
机构
[1] CALTECH,PASADENA,CA 91125
[2] UNIV BARI,IST FIS,I-70124 BARI,ITALY
[3] ROCKWELL INT,CTR SCI,THOUSAND OAKS,CA 91360
关键词
D O I
10.1016/0038-1101(78)90285-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:485 / 488
页数:4
相关论文
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